Vandenberghe, GeertGeertVandenbergheTzviatkov, PlamenPlamenTzviatkovYen, AnthonyAnthonyYenRonse, KurtKurtRonseVan den hove, LucLucVan den hoveLuehrmann, P.P.LuehrmannSlonaker, S.S.Slonakervan Ingen Schenau, K.K.van Ingen SchenauJuffermans, CasperCasperJuffermans2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1601248 nm lithography for the 0.18 μm generationProceedings paper