Characterization of diamond films grown under continuous DC bias by MW-PECVD – Evidence of ultra-nano-crystalline diamond film growth

Mortet, VincentVincentMortetZhang, L.L.ZhangD'Haen, JanJanD'HaenSoltani, A.A.SoltaniDouhéret, O.O.DouhéretTroadec, D.D.TroadecVan Tendeloo, G.G.Van TendelooWagner, PatrickPatrickWagnerHaenen, KenKenHaenen2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15895Characterization of diamond films grown under continuous DC bias by MW-PECVD – Evidence of ultra-nano-crystalline diamond film growthOral presentation