Requirements on CD and Overlay for 200GHz QSA SiGe:C HBT's

Van Wichelen, KoenKoenVan WichelenWitters, LiesbethLiesbethWittersVan Huylenbroeck, StefaanStefaanVan HuylenbroeckLeray, PhilippePhilippeLerayLaidler, DavidDavidLaidlerKunnen, EddyEddyKunnenDecoutere, StefaanStefaanDecoutere2021-10-152021-10-152004-09https://imec-publications.be/handle/20.500.12860/9804Requirements on CD and Overlay for 200GHz QSA SiGe:C HBT'sProceedings paper