Kuzma Filipek, IzabelaIzabelaKuzma FilipekSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan Radhakrishnan2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24088Porous silicon getteringBook chapter