Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash

Blomme, PieterPieterBlommeVersluijs, JankoJankoVersluijsErcken, MoniqueMoniqueErckenSouriau, LaurentLaurentSouriauHody, HubertHubertHodyVecchio, EmmaEmmaVecchioParaschiv, VasileVasileParaschivTan, Chi LimChi LimTanVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-232021-10-232016-05https://imec-publications.be/handle/20.500.12860/26355Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND FlashProceedings paper