Continuous and conformal lithium titanate spinel thin films by solid state reaction

Labyedh, NouhaNouhaLabyedhPut, BrechtBrechtPutEl Mel, Abdel-AzizAbdel-AzizEl MelVereecken, PhilippePhilippeVereecken2021-10-252021-10-2520180013-4651https://imec-publications.be/handle/20.500.12860/31103Continuous and conformal lithium titanate spinel thin films by solid state reactionJournal articlehttp://jes.ecsdl.org/content/165/8/B3184.full.pdf+html