Metrology for implanted Si substrate and dopant loss studies

Radisic, DunjaDunjaRadisicShamiryan, DenisDenisShamiryanMannaert, GeertGeertMannaertBoullart, WernerWernerBoullartRosseel, ErikErikRosseelBogdanowicz, JanuszJanuszBogdanowiczGoossens, JozefienJozefienGoossensMarrant, KoenKoenMarrantBender, HugoHugoBender2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16072Metrology for implanted Si substrate and dopant loss studiesMeeting abstract