Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries

Henderick, LowieLowieHenderickBlomme, RubenRubenBlommeMinjauw, MatthiasMatthiasMinjauwKeukelier, JonasJonasKeukelierMeersschaut, JohanJohanMeersschautDendooven, JolienJolienDendoovenVereecken, PhilippePhilippeVereeckenDetavernier, ChristopheChristopheDetavernier2022-08-252022-01-232022-04-252022-06-092022-08-252022-021477-9226WOS:000743625900001https://imec-publications.be/handle/20.500.12860/38772Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteriesJournal article10.1039/d1dt03417kWOS:000743625900001Applied physicsCYCLING PERFORMANCEALUMINUM PHOSPHATETHIN-FILMVOLTAGESTABILITYOXIDATIONELECTRODECOATINGSIRONNIMEDLINE:35040840