Vega Gonzalez, VictorVictorVega GonzalezMontero Alvarez, DanielDanielMontero AlvarezVersluijs, JankoJankoVersluijsVarela Pedreira, OlallaOlallaVarela PedreiraJourdan, NicolasNicolasJourdanPuliyalil, HarinarayananHarinarayananPuliyalilChehab, BilalBilalChehabPeissker, TobiasTobiasPeisskerHaider, AliAliHaiderBatuk, DmitryDmitryBatukMartinez Alanis, Gerardo TadeoGerardo TadeoMartinez AlanisGeypen, JefJefGeypenLe, Quoc ToanQuoc ToanLeBazzazian, NinaNinaBazzazianHeylen, NancyNancyHeylenvan der Veen, MarleenMarleenvan der VeenEl-Mekki, ZaidZaidEl-MekkiWebers, TomasTomasWebersVats, H.H.VatsRynders, LucLucRyndersCupak, MiroslavMiroslavCupakLee, Jae UkJae UkLeeDrissi, YoussefYoussefDrissiHalipre, LucLucHalipreGillijns, WernerWernerGillijnsCharley, Anne-LaureAnne-LaureCharleyVerdonck, PatrickPatrickVerdonckWitters, ThomasThomasWittersVan Gompel, SanderSanderVan GompelKimura, YosukeYosukeKimuraCiofi, IvanIvanCiofiDe Wachter, BartBartDe WachterSwerts, JohanJohanSwertsGrieten, EvaEvaGrietenErcken, MoniqueMoniqueErckenKim, Ryan Ryoung hanRyan Ryoung hanKimCroes, KristofKristofCroesLeray, PhilippePhilippeLerayJaysankar, ManojManojJaysankarNagesh, NishanthNishanthNageshRamakers, LeonLeonRamakersMurdoch, GayleGayleMurdochPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokeiDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2022-05-112022-05-052022-05-1120212380-632XWOS:000784773200049https://imec-publications.be/handle/20.500.12860/39735Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru MetallizationsProceedings paper10.1109/IITC51362.2021.9537535978-1-7281-7632-1WOS:000784773200049