Integrated Sensors to Experimentally Measure Microheater Uniformity: Geometry Implications in Meander-Based Structures

Calderon Gonzalez, MaiderMaiderCalderon GonzalezCheyns, DavidDavidCheynsAmeloot, RobRobAmelootGenoe, JanJanGenoe2025-04-072024-09-092025-04-0720241057-7157WOS:001303426100001https://imec-publications.be/handle/20.500.12860/44434Integrated Sensors to Experimentally Measure Microheater Uniformity: Geometry Implications in Meander-Based StructuresJournal article10.1109/JMEMS.2024.3447880WOS:001303426100001TEMPERATURE DISTRIBUTIONGAS SENSORSOPTIMIZATIONDESIGN