Kraus, HaraldHaraldKrausSnow, JimJimSnowVan Doorne, PatrickPatrickVan DoorneMertens, PaulPaulMertensKovacs, FredericFredericKovacs2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7754Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2Meeting abstract