Defectivity study during oxide CMP with composite polymer core – silica shell abrasives: the effect of the silica particle shape

Armini, SilviaSilviaArminiMoinpour, MansourMansourMoinpourWhelan, CarolineCarolineWhelanMaex, KarenKarenMaex2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11654Defectivity study during oxide CMP with composite polymer core – silica shell abrasives: the effect of the silica particle shapeProceedings paper