Zhang, W.D.W.D.ZhangZhang, J.F.J.F.ZhangZhao, C.Z.C.Z.ZhaoGroeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeve2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8436Which defect breaks down gate oxides?Oral presentation