Vrancken, NandiNandiVranckenSergeant, StefanieStefanieSergeantDoumen, GeertGeertDoumenHolsteyns, FrankFrankHolsteynsTerryn, HermanHermanTerrynDe Gendt, StefanStefanDe GendtXu, XiuMeiXiuMeiXu2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27558In-situ wetting characterization of silicon nanopillarsOral presentation