Becks, K.-H.K.-H.BecksBeyne, EricEricBeyneEhrmann, O.O.EhrmannGerlach, P.P.GerlachGregor, I. M.I. M.GregorPieters, PhilipPhilipPietersTöpper, M.M.TöpperTruzzi, ClaudioClaudioTruzziWolf, J.J.Wolf2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2381A MCM-D type module for the ATLAS pixel detectorProceedings paper