Eneman, GeertGeertEnemanDe Keersgieter, AnAnDe KeersgieterMocuta, AndaAndaMocutaCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25255FinFET stressor efficiency on alternative wafer and channel orientations for the14nm node and beyondProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165898