Troia, BenedettoBenedettoTroiaHuang, Chih HsienChih HsienHuangMao, ShengpingShengpingMaoGao, HangHangGaoFigeys, BrunoBrunoFigeysJansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochusRottenberg, XavierXavierRottenberg2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31973Coupled multiphysics circuital modelling of micro-opto-mechanical sensor systemsProceedings paperhttps://doi.org/10.1117/12.2290361