Surface passivation with SiNx:H for rear side locally contacted Si solar cells

De Wolf, StefaanStefaanDe WolfAgostinelli, GuidoGuidoAgostinelliBeaucarne, GuyGuyBeaucarne2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8806Surface passivation with SiNx:H for rear side locally contacted Si solar cellsProceedings paper