A model of threading dislocation density in strain-relaxed Ge and GaAs epitaxial films on Si (100)

Wang, GangGangWangLoo, RogerRogerLooSimoen, EddyEddySimoenSouriau, LaurentLaurentSouriauCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsBlanpain, BartBartBlanpain2021-10-182021-10-182009-030003-6951https://imec-publications.be/handle/20.500.12860/16518A model of threading dislocation density in strain-relaxed Ge and GaAs epitaxial films on Si (100)Journal article