Baklanov, MikhaïlMikhaïlBaklanovMogilnikov, K.P.K.P.MogilnikovYim, J-H.J-H.Yim2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8527Ellipsometric porosimetry of porous low-k films with quazi-closed cavitiesProceedings paper