The influence of surface preparation on rear surface passivation of mc-Si by thermally treated direct PECVD silicon nitride

Dekkers, HaroldHaroldDekkersDuerinckx, FilipFilipDuerinckxDe Wolf, StefaanStefaanDe WolfAgostinelli, GuidoGuidoAgostinelliSzlufcik, JozefJozefSzlufcik2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7485The influence of surface preparation on rear surface passivation of mc-Si by thermally treated direct PECVD silicon nitrideProceedings paper