Patterning of Hf/HfOx resistive RAM down to 20-nm CD

Vecchio, EmmaEmmaVecchioParaschiv, VasileVasileParaschivKar, Gouri SankarGouri SankarKarBoullart, WernerWernerBoullartJurczak, GosiaGosiaJurczakGovoreanu, BogdanBogdanGovoreanu2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21759Patterning of Hf/HfOx resistive RAM down to 20-nm CDMeeting abstract