Mechanical Wafer Engineering for High Efficiency Solar Cells: Investigations on the Induced Surface Damage

Fath, PeterPeterFathWilleke, GerhardGerhardWillekeBucher, E.E.BucherSzlufcik, JozefJozefSzlufcikMurti, R.R.MurtiDe Clercq, KoenKoenDe ClercqNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/153Mechanical Wafer Engineering for High Efficiency Solar Cells: Investigations on the Induced Surface DamageProceedings paper