In situ UHVEM irradiation study of intrinsic point defect behavior in Si nanowire structures

Vanhellemont, JanJanVanhellemontAnada, S.S.AnadaNagase, T.T.NagaseYasuda, H.H.YasudaBender, HugoHugoBenderRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandooren2021-10-232021-10-2320151610-1634https://imec-publications.be/handle/20.500.12860/26105In situ UHVEM irradiation study of intrinsic point defect behavior in Si nanowire structuresJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201400100/abstract