Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5nm gate oxides

De Gendt, StefanStefanDe GendtKnotter, D. M.D. M.KnotterKenis, KarineKarineKenisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2489Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5nm gate oxidesJournal article