Van Steenberge, GeertGeertVan SteenbergeVan Put, StevenStevenVan PutHendrickx, NinaNinaHendrickxBosman, ErwinErwinBosmanGeerinck, PeterPeterGeerinckVan Daele, PeterPeterVan DaeleSuyal, HimanshuHimanshuSuyalTaghizadeh, MoMoTaghizadeh2021-10-162021-10-162005-02https://imec-publications.be/handle/20.500.12860/11441Laser patterningMeeting abstract