Yu, J.J.YuUchida, J.J.UchidaVan Dommelen, Y.Y.Van DommelenCarpaij, R.R.CarpaijCheng, ShauneeShauneeChengPollentier, IvanIvanPollentierViswanathan, A.A.ViswanathanLane, L.L.LaneBarry, K.K.BarryJakatdar, N.N.Jakatdar2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9967Characterization of integrated optical CD for process controlProceedings paper