Volders, HennyHennyVoldersTokei, ZsoltZsoltTokeiSinapi, FabriceFabriceSinapiBender, HugoHugoBenderBenedetti, AlessandroAlessandroBenedettiBrijs, BertBertBrijsConard, ThierryThierryConardFranquet, AlexisAlexisFranquetSteenbergen, JohnnyJohnnySteenbergenTravaly, YoussefYoussefTravalySprey, HesselHesselSpreyLi, Wei-MinWei-MinLiShimizu, AkiraAkiraShimizuPark, Hyung SangHyung SangPark2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13196Thin film characterization of PEALD Ru layers on an ALD WNC substrateProceedings paper