Combined STEM-EDS tomography of nanowire structures

Bender, HugoHugoBenderKundu, ParomitaParomitaKunduRichard, OlivierOlivierRichardFavia, PaolaPaolaFaviaZhong, ZhichaoZhichaoZhongBatenburg, Kees JoostKees JoostBatenburgWirix, MaartenMaartenWirixSchoenmakers, RemcoRemcoSchoenmakers2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32522Combined STEM-EDS tomography of nanowire structuresProceedings paper