Severi, SimoneSimoneSeveriHenson, KirklenKirklenHensonLindsay, RichardRichardLindsayPawlak, BartekBartekPawlakDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9581Channel engineering towards a full low temperature process solution for the 45 nm technology nodeProceedings paper