Suhard, SamuelSamuelSuhardClaes, MartineMartineClaesLoh, JamesJamesLohVereecke, GuyGuyVereeckePantouvaki, MariannaMariannaPantouvakiDemuynck, StevenStevenDemuynckVereecke, BartBartVereeckeBeyer, GeraldGeraldBeyer2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16282Screening and evaluation of different wet cleaning solution for post etch residue removal in BEOL applicationsProceedings paper