Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturing

Baek, SeungjooSeungjooBaekVandereyken, JelleJelleVandereykenSuh, Hyo SeonHyo SeonSuhCaron, ElkeElkeCaronSantos, AndreiaAndreiaSantosHarumoto, MasahikoMasahikoHarumotoGuerrero, Douglas J.Douglas J.GuerreroHeo, SeonggilSeonggilHeo2025-06-192024-10-122025-06-1920241932-5150WOS:001326563600002https://imec-publications.be/handle/20.500.12860/44635Energy-efficient optical crosslinking of underlayers for sustainable and low-power semiconductor manufacturingJournal article10.1117/1.JMM.23.3.034602WOS:001326563600002