High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators

Feutmba, GIlles F.GIlles F.FeutmbaDa Silva, LeandroLeandroDa SilvaSingh, NishantNishantSinghBreyne, LaurensLaurensBreyneDe Geest, KobeKobeDe GeestPuthenparampil George, JohnJohnPuthenparampil GeorgeBauwelinck, JohanJohanBauwelinckVan Thourhout, DriesDriesVan ThourhoutYin, XinXinYinBeeckman, JeroenJeroenBeeckman2023-08-112023-08-052023-08-092023-08-1120232159-3930WOS:001033545300003https://imec-publications.be/handle/20.500.12860/42275High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulatorsJournal article10.1364/OME.494148WOS:001033545300003SILICON