Dutta, ShibeshShibeshDuttaKundu, ShreyaShreyaKunduWen, LianggongLianggongWenJamieson, GeraldineGeraldineJamiesonCroes, KristofKristofCroesGupta, AnshulAnshulGuptaBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonAdelmann, ChristophChristophAdelmannTokei, ZsoltZsoltTokei2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28292Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer processProceedings paperhttp://ieeexplore.ieee.org/document/7968937/