Van Look, LieveLieveVan LookBekaert, JoostJoostBekaertD'have, KoenKoenD'haveLaenens, BartBartLaenensVandenberghe, GeertGeertVandenbergheCheng, ShauneeShauneeChengSchreel, KoenKoenSchreelGemmink, Jan-WillemJan-WillemGemmink2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19985Optical proximity stability control of ArF immersion clustersProceedings paper