Franquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoKayser, S.S.KayserVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2022-09-012022-06-172022-09-0120220042-207XWOS:000806207500003https://imec-publications.be/handle/20.500.12860/39964OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structuresJournal article10.1016/j.vacuum.2022.111182WOS:000806207500003SELF-FOCUSING SIMSMASS