Kubicek, StefanStefanKubicekVan Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabieYamamoto, KazuhikoKazuhikoYamamotoBeckx, StephanStephanBeckxClaes, MartineMartineClaesVan Hoornick, NausikaaNausikaaVan HoornickKwak, Dong HwaDong HwaKwakHyun, SangjinSangjinHyunRothschild, AudeAudeRothschildVeloso, AnabelaAnabelaVelosoKottantharayil, AnilAnilKottantharayilLujan, GuilhermeGuilhermeLujanKittl, JorgeJorgeKittlLauwers, AnneAnneLauwersKaushik, VidyaVidyaKaushikNiwa, MasaakiMasaakiNiwaDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10726High-k dielectrics integration prospectsProceedings paper