Scanning probe tomography for the 3D-observation of conduction paths in advanced memory devices

Celano, UmbertoUmbertoCelanoVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25044Scanning probe tomography for the 3D-observation of conduction paths in advanced memory devicesOral presentationhttps://mrsspring.zerista.com/profile/member/774977