High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution

van Spengen, MerlijnMerlijnvan SpengenDe Wolf, IngridIngridDe WolfPuers, BobBobPuers2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5757High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolutionProceedings paper