Non-Gaussian behavior and anticorrelations in ultrathin gate oxides after soft breakdown

Vandewalle, N.N.VandewalleAusloos, M.M.AusloosHoussa, MichelMichelHoussaMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3970Non-Gaussian behavior and anticorrelations in ultrathin gate oxides after soft breakdownJournal article