Defect learning methodology applied to microbump process at 20μm pitch and below

Liebens, MaartenMaartenLiebensSlabbekoorn, JohnJohnSlabbekoornMiller, AndyAndyMillerBeyne, EricEricBeyneStoerring, M.M.StoerringHiebert, S.S.HiebertCross, A.A.Cross2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31193Defect learning methodology applied to microbump process at 20μm pitch and belowProceedings paperhttps://ieeexplore.ieee.org/document/8373210