Development of an SBT MOCVD production process for FERAM applications

Everaert, Jean-LucJean-LucEveraertBartic, AndreiAndreiBarticKaczer, BenBenKaczerWouters, DirkDirkWoutersMonchoix, HervéHervéMonchoixMitaut, ChristianChristianMitautVan Autryve, LucLucVan AutryvePavano, RitaRitaPavanoCasella, PatriziaPatriziaCasellaZambrano, R.R.Zambrano2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5283Development of an SBT MOCVD production process for FERAM applicationsMeeting abstract