Iacopi, FrancescaFrancescaIacopiWaldfried, CarloCarloWaldfriedHouthoofd, KristofKristofHouthoofdGuyer, EricEricGuyerGage, DavidDavidGageCarlotti, GiovanniGiovanniCarlottiTravaly, YoussefYoussefTravalyAbell, ThomasThomasAbellEscorcia, OrlandoOrlandoEscorciaBeyer, GeraldGeraldBeyerBerry, IvanIvanBerryDauskardt, ReinholdReinholdDauskardtMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10631UV-assisted curing: an effective technique for toughening of low-k organosilicate filmsOral presentation