Huyghebaert, CedricCedricHuyghebaertSchram, TomTomSchramSmets, QuentinQuentinSmetsAgarwal Kumar, TarunTarunAgarwal KumarVerreck, DevinDevinVerreckBrems, StevenStevenBremsPhommahaxay, AlainAlainPhommahaxayChiappe, DanieleDanieleChiappeEl Kazzi, SalimSalimEl KazziLockhart de la Rosa, Cesar JavierCesar JavierLockhart de la RosaArutchelvan, GouthamGouthamArutchelvanCott, DaireDaireCottLudwig, JonathanJonathanLudwigGaur, AbhinavAbhinavGaurSutar, SurajitSurajitSutarLeonhardt, AlessandraAlessandraLeonhardtMarinov, DaniilDaniilMarinovLin, DennisDennisLinCaymax, MattyMattyCaymaxAsselberghs, IngeIngeAsselberghsPourtois, GeoffreyGeoffreyPourtoisRadu, IulianaIulianaRadu2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/309272D materials: roadmap to CMOS integrationProceedings paperhttps://ieeexplore.ieee.org/document/8614679