Nakamura, T.T.NakamuraTakasu, R.R.TakasuWong, PatrickPatrickWongMaenhoudt, MireilleMireilleMaenhoudt2021-10-182021-10-1820090914-9244https://imec-publications.be/handle/20.500.12860/15911Process feasibility investigation of freezing free processJournal article