Vertically coupled microring resonators using one epitaxial growth step and single-side lithography

Lopez, Oscar GarciaOscar GarciaLopezVan Thourhout, DriesDriesVan ThourhoutLasaona, DanielDanielLasaonaLopez-Amo, ManuelManuelLopez-AmoBaets, RoelRoelBaetsGalarza, MarcoMarcoGalarza2021-10-222021-10-222015-021094-4087https://imec-publications.be/handle/20.500.12860/25576Vertically coupled microring resonators using one epitaxial growth step and single-side lithographyJournal articlehttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-23-4-5317