Eslava Fernandez, SalvadorSalvadorEslava FernandezUrrutia Fernandez de Retana, JoneJoneUrrutia Fernandez de RetanaBusawon, Abheesh NeervanAbheesh NeervanBusawonBaklanov, MikhaïlMikhaïlBaklanovIacopi, FrancescaFrancescaIacopiMaex, KarenKarenMaexKirschhock, Christine E.A.Christine E.A.KirschhockMartens, JohanJohanMartens2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15285Effects of silica sources on nanoporous organosilicate films with tetraalkylammonium cationsProceedings paper