Practical steps towards wafer-scaled III-V vertical FETs fabrication

Milenin, AlexeyAlexeyMileninVeloso, AnabelaAnabelaVelosoCollaert, NadineNadineCollaertPiumi, DanieleDanielePiumi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28980Practical steps towards wafer-scaled III-V vertical FETs fabricationMeeting abstracthttp://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf