Lattice-mismatched InGaAs layers grown by OMVPE on GaAs based compliant substrates

Vanhollebeke, KoenKoenVanhollebekeMoerman, IngridIngridMoermanVan Daele, PeterPeterVan DaeleDemeester, PietPietDemeester2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4898Lattice-mismatched InGaAs layers grown by OMVPE on GaAs based compliant substratesJournal article