Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

Mody, JayJayModyKambham, Ajay KumarAjay KumarKambhamZschaetzsch, GerdGerdZschaetzschSchatzer, PhilippPhilippSchatzerChiarella, ThomasThomasChiarellaCollaert, NadineNadineCollaertWitters, LiesbethLiesbethWittersJurczak, GosiaGosiaJurczakHoriguchi, NaotoNaotoHoriguchiGilbert, MatthieuMatthieuGilbertEyben, PierrePierreEybenKoelling, SebastianSebastianKoellingSchulze, AndreasAndreasSchulzeHoffmann, Thomas Y.Thomas Y.HoffmannVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17648Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolutionProceedings paper